CVD

  • Concept-One
  • Concept 2 Sequel
  • Concept 2 Altus
  • Concept 2 Speed
  • Ultima

More info

Etcher

  • E-MAX
  • Centura DPS

More info

Asher

  • L3510
  • PEP3510

More info

CMP

  • EBARA EPO222
  • Mira Mesa

More info

Chemical

  • Si Source
  • Ti Source
  • Zr Source
  • Hf Source
  • other Source

More info

Physical Vapor Deposition

Varian XM-90

Varian - Inline System
Back & Front side deposition process
Wafer Size : 4" to 6"
Versamag Source
Option : Etch, Deposition
Meterial : Al, Ti, Au, Ag, Ni, Cr, Va

Download Brochure

Varian-3000 Series

Varian - Inline System
3180 / 3190 / 3280 / 3290
Wafer Size : 4" to 6"
ConMag & Quantum Source
Option : Etch, 3 Deposition, VIPS
Meterial : Al, Ti, TiW, Au, Ag

Download Brochure

Varian-M2000

Varian - Cluster System
Wafer Size : 5" to 8"
Dual cassette loadlock
Option : Degas, Cool, Etch, Deposition, CDS Deposition
Meterial : Al, Ti, TiN, Tiw, Au

Download Brochure

Varian-M2i

Varian - Cluster System
Wafer Size : 5" to 8"
Dual cassette loadlock
Option : Degas, Cool, Etch, Deposition, CDS Deposition
Meterial : Al, Ti, TiN, Tiw, Au

Download Brochure

Varian-MB2

Varian - Cluster System
Wafer Size : 6" to 8"
Dual cassette loadlock

Download Brochure

Endura

AMAT - Cluster System
Wafer Size : 6" to 8"
ConMag & Quantum Source
Option : Robot arm, Loadlock body, Degas,
          Cool, Pre-II, IMP, CDS Deposition,
          SIP, Heater, E-chuck (Lo/Hi temp)
Meterial : Al, Ti, TiN, TiW, WSi, MOCVD

Download Brochure

Fronos

Maestech - Inline System
Wafer Size : 6" to 8"
Back & Front side deposition process
Option : Etch, Deposition
Meterial : Al, Ti, Au, Ag, Ni, Cr, Va

Download Brochure