R & D

Maestech has the facilities and expertise to remanufacture equipment to "zero defect" condition, and offers numerous upgrades and enhancements which are not available from OEM.

  • Upgrade

  • NCS
  • MST-90
  • MST-3000
  • Retrofit Enhanced for 3000 Series

  • Utility Box 8CH for 3000
  • Digital Heater Controller for 3000
  • Turbo L/L Controller for 3000
  • Retrofit Enhanced for M2i

  • APSC (DC Power Limit Interlock)
  • RF InterLock Kit (RF Power Limit Interlock)
  • RF Match Assistor (Phase, Magnitade Position Assistor)
  • Monitor for M2i include T-SW
  • Retrofit Enhanced for Endura

  • Detector of HTHU Heater Eliment status
  • RF + DC Combiner Controller

Upgrade


NCS

NCS Upgrade kit for Varian XM-90
(PVD Back & Front metal system)
Upgraded system Controller

Download manual

MST-90

NCS Upgrade kit for Varian XM-90
(PVD Back & Front metal system)
Upgraded system Controller

Download manual

MST-3000

NCS Upgrade kit for Varian XM-90
(PVD Back & Front metal system)
Upgraded system Controller

Download manual