Service Support

Value Proposition for customer

Increased Revenue :

Sale of surplus/obsolete tools, subsystems, peripherals,spare parts and consumables

Decreased Costs :

No warehousing of sparesNo personnel to service Varian & Novellus equipment

Improved Customer Satisfaction :

Customers work directly with experts in Varian PVD & NovellusCVD equipment.
Local service personnel and warehoused spares lessens service response time Value-added services increase customer ROI

Contribution to the customer

Inspection and purchase of used tools. Refurbishment and storage of tools at Maestech facilitiesin Asia and U.S. Performance enhancements for both hardware and software Reconfiguration to meet customer requirements for wafer size and deposition process including adding/removing chambers.
Thorough testing prior to shipment using process gases on 100 wafers. Installation and onsite support, including an optional preventive maintenance program.

Useful info

Primary contacts


13, Dongcheong-Ri, Godeok-Myeon, PyungTaek-City, GyungGi-Do,

+82 31 665 7844Telephone:
+82 31 665 7843FAX:


Room 14G, Building B, Yueda International Plaza, 1118 Changshou Road, Shanghai 200042, PRC.

+86 21 6226 3296Telephone:
+86 21 6226 1835FAX:

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